Abatement of hazardous gases in effluent
The present invention is related to an apparatus and method for reducing a hazardous gas content of an effluent from a process chamber. An apparatus and method for reducing hazardous gases exhausted from a process chamber includes an effluent plasma reactor and a downstream catalytic reactor . The r...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | The present invention is related to an apparatus and method for reducing a hazardous gas content of an effluent from a process chamber.
An apparatus and method for reducing hazardous gases exhausted from a process chamber includes an effluent plasma reactor and a downstream catalytic reactor . The reactor may include a consumable liner that reacts with the energized effluent to remove the hazardous gases. The catalytic reactor may also include catalytic surfaces in a honeycomb, foam, or pellet structure to catalyze reactions that further reduce hazardous gas content. |
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