Miniature microdevice package and process for making thereof

The present invention is concerned with a miniature microdevice package and a process of fabricating such a miniature microdevice package. Miniature microdevice packages are made for miniature microdevices such as accelerometers, digital micromirrors, emitters and detectors. Several of these miniatu...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Jerominek, Hubert, Alain, Christine
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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