Robotic storage buffer system for substrate carrier pods

The present invention relates to devices and methods for the stocking/buffering of substrate and substrate carriers and particularly to stocking/buffering using a robot arm. A storage/buffering system for the stocking and/or buffering of substrate and/or substrate carriers in a process environment i...

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Hauptverfasser: Nasr, Amro, Kabbani, Samer
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present invention relates to devices and methods for the stocking/buffering of substrate and substrate carriers and particularly to stocking/buffering using a robot arm. A storage/buffering system for the stocking and/or buffering of substrate and/or substrate carriers in a process environment includes a 6-axis robot. An end-effector is connected with the robot providing an additional one degree of freedom and a mechanism for grabbing and moving of substrate and/or substrate carriers. The robot is mounted in an inverted orientation to a removable service cart for easy removal of the robot to a service area in the event of breakdown. The robot receives commands from a programmable controller connected to control the robot and configured to direct the arm of the robot through a set of movements. Product is loaded in and out of the system through I/O load ports. Product is stored inside the storage/buffering system on a plurality of storage locations, each with product presence/absence detect sensor.