Semiconductor memory device and method of forming the same
The present invention relates to a semiconductor memory device and a method of forming the same, and more particularly to a static random access memory having unloaded 4 Tr complementary MOS static random access memory cells. In accordance with the present invention, the gate length and the gate ins...
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Sprache: | eng |
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Zusammenfassung: | The present invention relates to a semiconductor memory device and a method of forming the same, and more particularly to a static random access memory having unloaded 4 Tr complementary MOS static random access memory cells.
In accordance with the present invention, the gate length and the gate insulation film thickness are different between the p-channel MOS field effect transistors serving as the driver gates and the n-channel MOS field effect transistors forming the flip flop. Namely, the p-channel MOS field effect transistors serving as the driver gates have a larger gate length and a smaller gate oxide film thickness than the n-channel MOS field effect transistors forming the flip flop. |
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