Planarization of ceramic substrates using porous materials

1. Field of Invention This invention provides a concept of using porous materials on ceramic substrate planarization. This planarized substrate consists of a ceramic substrate, a buffer layer, and a nanostructure layer. The ceramic substrate provides structural strength and surface-mount capability....

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Bibliographische Detailangaben
Hauptverfasser: Shuy, Geoffrey Wen-Tai, Lu, Jong-Hong, Liao, Sheng-Ju, Chang, Huai-Luh, Hong, Song-Wein, Huang, Ruey-Cheng
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:1. Field of Invention This invention provides a concept of using porous materials on ceramic substrate planarization. This planarized substrate consists of a ceramic substrate, a buffer layer, and a nanostructure layer. The ceramic substrate provides structural strength and surface-mount capability. The buffer layer provides the adhesion between the substrate and the nanostructure layer. The nanostructure layer provides the required surface smoothness of the ceramic substrates for performing thin-film processing techniques and enhances adhesion for metallization and electronic materials.