Gas cluster ion beam low mass ion filter

This invention relates generally to gas cluster ion beam (GCIB) processing equipment, and, more particularly to incorporating means within GCIB processing equipment for eliminating monomer ions from the ion cluster beam without the production of unwanted heat. Incorporating the use of a permanent magnet within a GCIB apparatus to separate undesirable monomer ions from a gas cluster ion beam to facilitate improved processing of workpieces. In an alternate embodiment, the effect of the permanent magnet may be controlled by the use of an electrical coil. The above system eliminates problems related to power consumption and heat generation.