Method and apparatus for using integrated remote identifier
1. Field of the Invention The present invention provides for a method and an apparatus for using an integrated remote identifier for processing semiconductor wafers. Process data is associated with a remote identifier. A remote identifier interfacing process based upon the remote identifier is perfo...
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| Hauptverfasser: | , |
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | 1. Field of the Invention
The present invention provides for a method and an apparatus for using an integrated remote identifier for processing semiconductor wafers. Process data is associated with a remote identifier. A remote identifier interfacing process based upon the remote identifier is performed. A first processing run of semiconductor devices is performed in response to the remote identifier interfacing process. |
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