Abrasive
1. Field of the Invention An abrasive for planarization of glass substrates for hard discs comprising abrasive grains mainly composed of rare earth oxides containing cerium oxide, wherein the abrasive grains has a cerium oxide/total rare earth oxide ratio of 95 wt %.
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | 1. Field of the Invention
An abrasive for planarization of glass substrates for hard discs comprising abrasive grains mainly composed of rare earth oxides containing cerium oxide, wherein the abrasive grains has a cerium oxide/total rare earth oxide ratio of 95 wt %. |
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