Structure and method of fabrication for an optical switch

This invention relates generally to semiconductor structures and devices and to methods for their fabrication. More specifically the invention relates to the fabrication and use of semiconductor structures, devices, and integrated circuits that include optical switching devices. A structure for an o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Tungare, Aroon, Lian, Keryn, Lempkowski, Robert, Barenburg, Barbara Foley
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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