Stage assembly including a reaction assembly

The present invention is directed to a stage assembly for moving a device. More specifically, the present invention is directed to a stage assembly including a reaction assembly for an exposure apparatus. A stage assembly () for moving and positioning a device () is provided herein. The stage assemb...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Watson, Doug, Hazelton, Andrew J, Binnard, Mike
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present invention is directed to a stage assembly for moving a device. More specifically, the present invention is directed to a stage assembly including a reaction assembly for an exposure apparatus. A stage assembly () for moving and positioning a device () is provided herein. The stage assembly () includes a stage base (), a stage (), a stage mover assembly (), and a reaction assembly (). The stage mover assembly () moves the stage () along an X axis and along a Y axis relative to the stage base (). The reaction assembly () is coupled to the stage mover assembly (). Uniquely, the reaction assembly () counteracts and reduces the reaction forces created by the stage mover assembly () in two degrees of freedom that are transferred to a reaction base (). With this design, stage mover assembly () has less influence upon the position of the stage base (). These features allow for more accurate positioning of the device () by the stage assembly () and better performance of the stage assembly ().