Nozzle plate and a manufacturing process thereof

1. Field of the Invention A nozzle plate is provided with nozzle orifices through which ink is to be ejected, the nozzle orifices being formed by an excimer laser. A manufacturing process for manufacturing the nozzle plate in which the nozzle orifices are formed by the excimer laser uses a working l...

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Bibliographische Detailangaben
1. Verfasser: Aoki, Hikoharu
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:1. Field of the Invention A nozzle plate is provided with nozzle orifices through which ink is to be ejected, the nozzle orifices being formed by an excimer laser. A manufacturing process for manufacturing the nozzle plate in which the nozzle orifices are formed by the excimer laser uses a working lens having a numerical aperture (NA) set to 0.13 or more and 0.35 or less.