System for tracking quartzware utilization in semiconductor fabrication

1. Field of the Invention A system and storage medium for tracking quartzware utilization in vertical furnaces is provided. The system includes a computer server and a plurality of computer systems. The computer server maintains a database of quartzware inventory data and furnace data. The quartzware inventory data includes all relevant information about each piece of quartzware including a history of each piece of quartzware. The furnace data includes information about the part numbers of each piece of quartzware used for each vertical furnace. Program instructions are also stored on the computer server. The program allow personnel to access and modify information maintained in the database from any one of the plurality of computer systems. During servicing of a vertical furnace, the program displays each of the quartzware pieces that need to be changed. The program may also calculate statistical information relating to quartzware usage. The computer server may also be connected to an automated factory system such that the computer server may obtain a number of process cycles performed by a vertical furnace.