Calibration method for quantitative elemental analysis

The present invention is directed, in general, to a method of calibrating an analytical tool and, more specifically, to a method of calibrating an analytical tool including determining a detection limit associated with the tool. The present invention provides a method of calibrating an analytical tool. The method, in a illustrative embodiment, includes determining a concentration of an element located within a known matrix, obtaining a calibration standard of the known matrix with a polishing process, the calibration standard being representative of the concentration, and obtaining a detection limit of an analytical tool with respect to the concentration. Furthermore, secondary ion mass spectrometry may be used to determine the concentration of the element within the known matrix.