Method and device for making a metal bump with an increased height

Method and device for making a metal bump with an increased height

1. Field of the Invention A device for making metal bumps includes a hard conical tubular member having a vertical conical passage at an upper portion thereof, a bell shaped chamber at a lower portion thereof which is larger than the vertical conical passage in diameter, located under and communicat...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Shieh, Wen-Lo, Huang, Ning, Chen, Hui-Pin, Chiang, Hua-Wen, Chang, Chung-Ming, Tu, Feng-Chang, Huang, Fu-Yu, Chang, Hsuan-Jui, Hu, Chia-Chieh, Leu, Wen-Long
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:1. Field of the Invention A device for making metal bumps includes a hard conical tubular member having a vertical conical passage at an upper portion thereof, a bell shaped chamber at a lower portion thereof which is larger than the vertical conical passage in diameter, located under and communicated with the vertical conical passage, and a circular recess which is larger than the bell shaped chamber in diameter, located under and communicated with the bell shaped chamber, thereby forming a capillary tube with a surface.