Apparatus and method of producing pressure sensors and diaphragms for said pressure sensors

Apparatus and method of producing pressure sensors and diaphragms for said pressure sensors

1. Field of the Invention A method of producing a number of pressure sensors includes joining a plurality of support bodies to a metal component, the metal component forming a diaphragm, applying a thin-film coating to produce the sensor elements, and finally dividing the metal component provided wi...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Naegele, Erwin, Mast, Martin, Fischer, Werner, Foerstner, Rainer
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator Naegele, Erwin
Mast, Martin
Fischer, Werner
Foerstner, Rainer
description 1. Field of the Invention A method of producing a number of pressure sensors includes joining a plurality of support bodies to a metal component, the metal component forming a diaphragm, applying a thin-film coating to produce the sensor elements, and finally dividing the metal component provided with the thin-film coating and the support bodies into a plurality of pressure sensors, each having a single one of the support bodies so that the number of pressure sensors formed corresponds to the plurality of the support bodies.
format Patent
fullrecord <record><control><sourceid>uspatents_EFH</sourceid><recordid>TN_cdi_uspatents_grants_06490932</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>06490932</sourcerecordid><originalsourceid>FETCH-uspatents_grants_064909323</originalsourceid><addsrcrecordid>eNqNyjEKAkEMQNFpLES9Qy4gLK4IW4ooHsDOQoLJzA64k5DM3F9FOxur_4s3D9e9KhrW5oCFYOI6CoFEUBNq91zS69i9GYNzcbEPpIw6GqbJIYqBY6YfuAyziA_n1beLAKfj5XBeN1esXKrfkuE73W47dEO_6f8gT2qqPP4</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Apparatus and method of producing pressure sensors and diaphragms for said pressure sensors</title><source>USPTO Issued Patents</source><creator>Naegele, Erwin ; Mast, Martin ; Fischer, Werner ; Foerstner, Rainer</creator><creatorcontrib>Naegele, Erwin ; Mast, Martin ; Fischer, Werner ; Foerstner, Rainer ; Robert Bosch GmbH</creatorcontrib><description>1. Field of the Invention A method of producing a number of pressure sensors includes joining a plurality of support bodies to a metal component, the metal component forming a diaphragm, applying a thin-film coating to produce the sensor elements, and finally dividing the metal component provided with the thin-film coating and the support bodies into a plurality of pressure sensors, each having a single one of the support bodies so that the number of pressure sensors formed corresponds to the plurality of the support bodies.</description><language>eng</language><creationdate>2002</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6490932$$EPDF$$P50$$Guspatents$$Hfree_for_read</linktopdf><link.rule.ids>230,308,776,798,881,64015</link.rule.ids><linktorsrc>$$Uhttps://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6490932$$EView_record_in_USPTO$$FView_record_in_$$GUSPTO$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Naegele, Erwin</creatorcontrib><creatorcontrib>Mast, Martin</creatorcontrib><creatorcontrib>Fischer, Werner</creatorcontrib><creatorcontrib>Foerstner, Rainer</creatorcontrib><creatorcontrib>Robert Bosch GmbH</creatorcontrib><title>Apparatus and method of producing pressure sensors and diaphragms for said pressure sensors</title><description>1. Field of the Invention A method of producing a number of pressure sensors includes joining a plurality of support bodies to a metal component, the metal component forming a diaphragm, applying a thin-film coating to produce the sensor elements, and finally dividing the metal component provided with the thin-film coating and the support bodies into a plurality of pressure sensors, each having a single one of the support bodies so that the number of pressure sensors formed corresponds to the plurality of the support bodies.</description><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2002</creationdate><recordtype>patent</recordtype><sourceid>EFH</sourceid><recordid>eNqNyjEKAkEMQNFpLES9Qy4gLK4IW4ooHsDOQoLJzA64k5DM3F9FOxur_4s3D9e9KhrW5oCFYOI6CoFEUBNq91zS69i9GYNzcbEPpIw6GqbJIYqBY6YfuAyziA_n1beLAKfj5XBeN1esXKrfkuE73W47dEO_6f8gT2qqPP4</recordid><startdate>20021210</startdate><enddate>20021210</enddate><creator>Naegele, Erwin</creator><creator>Mast, Martin</creator><creator>Fischer, Werner</creator><creator>Foerstner, Rainer</creator><scope>EFH</scope></search><sort><creationdate>20021210</creationdate><title>Apparatus and method of producing pressure sensors and diaphragms for said pressure sensors</title><author>Naegele, Erwin ; Mast, Martin ; Fischer, Werner ; Foerstner, Rainer</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-uspatents_grants_064909323</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2002</creationdate><toplevel>online_resources</toplevel><creatorcontrib>Naegele, Erwin</creatorcontrib><creatorcontrib>Mast, Martin</creatorcontrib><creatorcontrib>Fischer, Werner</creatorcontrib><creatorcontrib>Foerstner, Rainer</creatorcontrib><creatorcontrib>Robert Bosch GmbH</creatorcontrib><collection>USPTO Issued Patents</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Naegele, Erwin</au><au>Mast, Martin</au><au>Fischer, Werner</au><au>Foerstner, Rainer</au><aucorp>Robert Bosch GmbH</aucorp><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Apparatus and method of producing pressure sensors and diaphragms for said pressure sensors</title><date>2002-12-10</date><risdate>2002</risdate><abstract>1. Field of the Invention A method of producing a number of pressure sensors includes joining a plurality of support bodies to a metal component, the metal component forming a diaphragm, applying a thin-film coating to produce the sensor elements, and finally dividing the metal component provided with the thin-film coating and the support bodies into a plurality of pressure sensors, each having a single one of the support bodies so that the number of pressure sensors formed corresponds to the plurality of the support bodies.</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng
recordid cdi_uspatents_grants_06490932
source USPTO Issued Patents
title Apparatus and method of producing pressure sensors and diaphragms for said pressure sensors
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-24T07%3A02%3A58IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-uspatents_EFH&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Naegele,%20Erwin&rft.aucorp=Robert%20Bosch%20GmbH&rft.date=2002-12-10&rft_id=info:doi/&rft_dat=%3Cuspatents_EFH%3E06490932%3C/uspatents_EFH%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true