Apparatus and method of producing pressure sensors and diaphragms for said pressure sensors
1. Field of the Invention A method of producing a number of pressure sensors includes joining a plurality of support bodies to a metal component, the metal component forming a diaphragm, applying a thin-film coating to produce the sensor elements, and finally dividing the metal component provided wi...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | 1. Field of the Invention
A method of producing a number of pressure sensors includes joining a plurality of support bodies to a metal component, the metal component forming a diaphragm, applying a thin-film coating to produce the sensor elements, and finally dividing the metal component provided with the thin-film coating and the support bodies into a plurality of pressure sensors, each having a single one of the support bodies so that the number of pressure sensors formed corresponds to the plurality of the support bodies. |
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