Clear adhesive sheet

The invention relates to adhesive coated sheets used during fabrication of electronic devices and more particularly to adhesive coatings having a low level of haze and reduced levels of tack after exposure to suitable radiation. A radiation detackifiable adhesive composition comprising a (meth)acryl...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Alahapperuma, Karunasena A, Kantner, Steven S
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention relates to adhesive coated sheets used during fabrication of electronic devices and more particularly to adhesive coatings having a low level of haze and reduced levels of tack after exposure to suitable radiation. A radiation detackifiable adhesive composition comprising a (meth)acrylate copolymer including from about 85 wt. % to about 97.5 wt. % of a (meth)acrylate ester and from about 2.5 wt. % to about 15 wt. % of a copolymerizable carboxylate monomer and a multi-functional urethane acrylate oligomer combined with the (meth)acrylate copolymer to provide from about 25 parts to about 40 parts of the oligomer per 100 parts of the copolymer. The adhesive composition becomes progressively detackified during exposure to ultraviolet radiation.The present invention further provides a clear adhesive coated sheet for supporting a silicon wafer during manufacture of semiconductor microchips. The coated sheet comprises a transparent film substrate coated with a radiation detackifiable adhesive composition.