Method and apparatus for implementing efficient CMOS photo sensors

The present invention relates to the field of electronic image sensor circuits. In particular, the present invention relates to CMOS photo sensor design and wafer processing of photo sensors within the framework of a CMOS process. Semiconductor photo sensor and semiconductor wafer processing designs are disclosed. The disclosed designs provide significantly improved photo sensor performance within the framework of a CMOS process. CMOS compatible fabrication procedures are presented, that enable tailoring of the 3-dimensional doping profile and defect structure within a photo sensor, to optimize light detection efficiency and minimize noise from dark current.