Electrostatic chuck having improved electrical connector and method
The present invention relates to an electrostatic chuck for holding a substrate in a chamber. An electrostatic chuck comprises an electrical connector which is connected to the electrode to conduct an electrical charge to the electrode The electrical connector comprises a refractory metal having a m...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | The present invention relates to an electrostatic chuck for holding a substrate in a chamber.
An electrostatic chuck comprises an electrical connector which is connected to the electrode to conduct an electrical charge to the electrode The electrical connector comprises a refractory metal having a melting temperature of at least about 1500° C., such as for example, tungsten, titanium, nickel, tantalum, molybdenum, or alloys thereof. Preferably, the electrical connector is bonded to the electrode by a metal having a softening temperature of less than about 600° C., such as aluminum, indium, or low melting point alloys. |
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