Deflectable micro-mirror
The present invention relates to micromirror. An oscillatory micromirror having a cantilevered mirror surface is joined using at least one torsion axis formed by at least one torsion beam mounted on the mirror surface, to a support member that surrounds at least portions of the mirror surface. There...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | The present invention relates to micromirror.
An oscillatory micromirror having a cantilevered mirror surface is joined using at least one torsion axis formed by at least one torsion beam mounted on the mirror surface, to a support member that surrounds at least portions of the mirror surface. There is located between at least one of the torsion beams and the support member a flexural beam that performs a flexural oscillation which induces a torsional oscillation of the mirror surface about the torsion axis. At a suitable frequency, large amplitudes of the torsional oscillation may be provided by small amplitudes of the flexural oscillation. |
|---|