Conductive biasing member for metal layering

1. Field of the Invention A contact ring applies electroplating to a substrate having an electrically conductive portion. The contact ring comprises an annular insulative body, a conductive biasing member, and a seal member. The annular insulative body defines a central opening. The conductive biasi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Stevens, Joseph, Cowan, Norman, Tzou, Chien-Shien
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:1. Field of the Invention A contact ring applies electroplating to a substrate having an electrically conductive portion. The contact ring comprises an annular insulative body, a conductive biasing member, and a seal member. The annular insulative body defines a central opening. The conductive biasing member is configured to exert a biasing force upon the substrate.