Apparatus for molding semiconductor components
This invention relates generally to semiconductor manufacture, and specifically to an apparatus, to a method, and to a system for molding semiconductor components, such as plastic packages, BGA devices and chip scale packages. A molding apparatus for molding semiconductor components includes a pair...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | This invention relates generally to semiconductor manufacture, and specifically to an apparatus, to a method, and to a system for molding semiconductor components, such as plastic packages, BGA devices and chip scale packages.
A molding apparatus for molding semiconductor components includes a pair of opposing mold chases having mating mold cavities. The mold cavities are configured to retain polymer release films and also includes a movable pot having a reservoir for retaining a preform of molding compound, and a plunger for moving the molding compound into the mold cavities. The movable pot is mounted for axial movement within a chamfered opening in one of the mold chases. The movable pot is configured to clamp onto release films to prevent wrinkling of the release films, and seepage of the molding compound under the release films. A system for molding semiconductor components includes the molding apparatus, a pot drive mechanism for moving the movable pot, a plunger drive mechanism for moving the plunger, and a clamping mechanism for clamping the mold chases together. |
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