Method of applying a coating solution to a substrate surface using a rotary coater

1. Field of the Invention A slit nozzle is positioned above an end of a glass substrate placed in an inner cup, and, while a coating solution is being ejected with reduced surface tension from the slit nozzle toward the glass substrate, the slit nozzle is translated parallel to the surface of the gl...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Sago, Hiroyoshi, Fujiyama, Shigemi, Shimai, Futoshi, Uehara, Akira
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:1. Field of the Invention A slit nozzle is positioned above an end of a glass substrate placed in an inner cup, and, while a coating solution is being ejected with reduced surface tension from the slit nozzle toward the glass substrate, the slit nozzle is translated parallel to the surface of the glass substrate to roughly coat the coating solution on substantially the entire surface of the glass substrate. Thereafter, the upper opening of the inner cup and the upper opening of an outer cup around the inner cup are closed by respective lids, and then the inner cup is rotated to rotate the glass substrate for thereby spreading the coated solution uniformly over the surface of the glass substrate under centrifugal forces.