Methods and apparatus for improving resolution and reducing noise in an image detector for an electron microscope

The present invention relates to methods and apparatus for use in an electron microscope to improve the detection of electron images, and more particularly to methods and apparatus for converting and using the energy of the electrons in the image to improve image resolution and reduce noise. Methods and apparatus are provided which improve the performance of electron imaging detectors by reducing the total interaction volume of the detector and/or reducing the energy converting volume of the detector. In one embodiment, a method for improving resolution and reducing noise in an imaging electron detector for an electron microscope is provided and includes the step of decelerating the energetic electrons either before the electrons interact with, or as the electrons interact with, the energy converting volume of an imaging electron detector. In other embodiments, the lateral spatial travel of energetic electrons is limited as they traverse the imaging electron detector, or, the extent of electron back scatter from the energetic electrons is limited.