Method for determining opened/unopened semiconductor contacts using a scanning electron microscope

Method for determining opened/unopened semiconductor contacts using a scanning electron microscope

1. Field of the Invention A method for inspecting a plurality of similar structures in the surface of a workpiece includes providing a workpiece having a plurality of regions, each of the regions including at least two different materials, generating an image from each of the regions such that an im...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: Bowley, Jr., Reginald R
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator Bowley, Jr., Reginald R
description 1. Field of the Invention A method for inspecting a plurality of similar structures in the surface of a workpiece includes providing a workpiece having a plurality of regions, each of the regions including at least two different materials, generating an image from each of the regions such that an image contrast between the two materials is enhanced and classifying the images into at least two classes including an acceptable class of images and unacceptable class of images.
format Patent
fullrecord <record><control><sourceid>uspatents_EFH</sourceid><recordid>TN_cdi_uspatents_grants_06414308</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>06414308</sourcerecordid><originalsourceid>FETCH-uspatents_grants_064143083</originalsourceid><addsrcrecordid>eNqNizEOwjAMALswIOAP_gCiqBViRyAWNnZkHLdEau0qdv5PCjyA6W64W1bPG_tLA3SaILBzGqNE6UEnFg67LF8B4zGSSsjkpSzmSG6QbY4RjFA-Hw9MnlSg5EmNyr6uFh0OxpsfVxVczvfTdZttQmdxe_QJZ9SHdt829bH5I3kDhQ4_9w</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Method for determining opened/unopened semiconductor contacts using a scanning electron microscope</title><source>USPTO Issued Patents</source><creator>Bowley, Jr., Reginald R</creator><creatorcontrib>Bowley, Jr., Reginald R ; International Business Machines Corporation</creatorcontrib><description>1. Field of the Invention A method for inspecting a plurality of similar structures in the surface of a workpiece includes providing a workpiece having a plurality of regions, each of the regions including at least two different materials, generating an image from each of the regions such that an image contrast between the two materials is enhanced and classifying the images into at least two classes including an acceptable class of images and unacceptable class of images.</description><language>eng</language><creationdate>2002</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6414308$$EPDF$$P50$$Guspatents$$Hfree_for_read</linktopdf><link.rule.ids>230,308,776,798,881,64012</link.rule.ids><linktorsrc>$$Uhttps://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6414308$$EView_record_in_USPTO$$FView_record_in_$$GUSPTO$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Bowley, Jr., Reginald R</creatorcontrib><creatorcontrib>International Business Machines Corporation</creatorcontrib><title>Method for determining opened/unopened semiconductor contacts using a scanning electron microscope</title><description>1. Field of the Invention A method for inspecting a plurality of similar structures in the surface of a workpiece includes providing a workpiece having a plurality of regions, each of the regions including at least two different materials, generating an image from each of the regions such that an image contrast between the two materials is enhanced and classifying the images into at least two classes including an acceptable class of images and unacceptable class of images.</description><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2002</creationdate><recordtype>patent</recordtype><sourceid>EFH</sourceid><recordid>eNqNizEOwjAMALswIOAP_gCiqBViRyAWNnZkHLdEau0qdv5PCjyA6W64W1bPG_tLA3SaILBzGqNE6UEnFg67LF8B4zGSSsjkpSzmSG6QbY4RjFA-Hw9MnlSg5EmNyr6uFh0OxpsfVxVczvfTdZttQmdxe_QJZ9SHdt829bH5I3kDhQ4_9w</recordid><startdate>20020702</startdate><enddate>20020702</enddate><creator>Bowley, Jr., Reginald R</creator><scope>EFH</scope></search><sort><creationdate>20020702</creationdate><title>Method for determining opened/unopened semiconductor contacts using a scanning electron microscope</title><author>Bowley, Jr., Reginald R</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-uspatents_grants_064143083</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2002</creationdate><toplevel>online_resources</toplevel><creatorcontrib>Bowley, Jr., Reginald R</creatorcontrib><creatorcontrib>International Business Machines Corporation</creatorcontrib><collection>USPTO Issued Patents</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Bowley, Jr., Reginald R</au><aucorp>International Business Machines Corporation</aucorp><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Method for determining opened/unopened semiconductor contacts using a scanning electron microscope</title><date>2002-07-02</date><risdate>2002</risdate><abstract>1. Field of the Invention A method for inspecting a plurality of similar structures in the surface of a workpiece includes providing a workpiece having a plurality of regions, each of the regions including at least two different materials, generating an image from each of the regions such that an image contrast between the two materials is enhanced and classifying the images into at least two classes including an acceptable class of images and unacceptable class of images.</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng
recordid cdi_uspatents_grants_06414308
source USPTO Issued Patents
title Method for determining opened/unopened semiconductor contacts using a scanning electron microscope
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-05T02%3A56%3A13IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-uspatents_EFH&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Bowley,%20Jr.,%20Reginald%20R&rft.aucorp=International%20Business%20Machines%20Corporation&rft.date=2002-07-02&rft_id=info:doi/&rft_dat=%3Cuspatents_EFH%3E06414308%3C/uspatents_EFH%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true