Method for determining opened/unopened semiconductor contacts using a scanning electron microscope

1. Field of the Invention A method for inspecting a plurality of similar structures in the surface of a workpiece includes providing a workpiece having a plurality of regions, each of the regions including at least two different materials, generating an image from each of the regions such that an image contrast between the two materials is enhanced and classifying the images into at least two classes including an acceptable class of images and unacceptable class of images.