Detecting die speed variations

The present invention relates to the field of semiconductor device fabrication processes, and more particularly to an apparatus and method for detecting speed variations across at die, a flash field, i.e. multiple dies, and multiple flash fields. An apparatus and method for detecting speed variation...

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Bibliographische Detailangaben
Hauptverfasser: Fuselier, Mark Brandon, Ray, Stephen Doug, Dunn, Michael James, Williams, Roger T, Fenske, Michael V
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present invention relates to the field of semiconductor device fabrication processes, and more particularly to an apparatus and method for detecting speed variations across at die, a flash field, i.e. multiple dies, and multiple flash fields. An apparatus and method for detecting speed variations across a die, a flash field, i.e., multiple dies, and multiple flash fields. In one embodiment, a method comprises the step of inserting a plurality of functional circuits at strategic locations across a die or flash field or multiple flash fields where each of the plurality of functional circuits generates data, e.g., values, frequency, etc., correlated to the die speeds at the strategic locations. The method further comprises reading the data generated by the plurality of functional circuits that may be correlated to the die speeds at the strategic locations. Speed variations across the die or flash field or multiple flash fields may then be subsequently detected based on the data generated by the plurality of functional circuits. Upon analyzing the data generated by the plurality of functional circuits, adjustments may be made to the manufacturing process to improve the number of acceptable integrated circuits or chips disposed in the dies.