Processing apparatus and method of control
1. Field of the Invention A processing apparatus processes an object, and includes at least first and second processing devices that are separated from each other by a partition. The apparatus includes a first housing that covers the first processing device, and a second housing that covers the seco...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | 1. Field of the Invention
A processing apparatus processes an object, and includes at least first and second processing devices that are separated from each other by a partition. The apparatus includes a first housing that covers the first processing device, and a second housing that covers the second processing device. The second housing includes a first door device that is capable of opening the second housing. The apparatus also includes a controller having a CPU to control the first and second processing devices in accordance with a state of the first door device. The controller stops at least a part of the second processing device, and does not stop at least a part of the first processing device, when the first door device opens the second housing. |
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