Support assembly with thermal expansion compensation

The invention relates to supporting a substrate in a chamber. A substrate support assembly comprises a substrate support and a collar which may comprise at least one slit . The slit allows for thermal expansion compensation in the support assembly . The collar may, for example, protect the dielectri...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Schneider, Gerhard M, Noorbakhsh, Hamid, Pu, Bryan, Vaidya, Kaushik, Mays, Brad Leroy, Dao, Hung, Lee, Evans, Shan, Hongging
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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