Support assembly with thermal expansion compensation
The invention relates to supporting a substrate in a chamber. A substrate support assembly comprises a substrate support and a collar which may comprise at least one slit . The slit allows for thermal expansion compensation in the support assembly . The collar may, for example, protect the dielectri...
Gespeichert in:
| Hauptverfasser: | , , , , , , , |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | The invention relates to supporting a substrate in a chamber.
A substrate support assembly comprises a substrate support and a collar which may comprise at least one slit . The slit allows for thermal expansion compensation in the support assembly . The collar may, for example, protect the dielectric from erosion in a process chamber . In one version, the collar comprises a clamping ring on the dielectric |
|---|