Micro-bolometer cell structure

1. Field of the Invention A pyroelectric detector system, the pyroelectric detector element therefor and the method of making the detector element which comprises an integrated circuit () and a pyroelectric detector element () coupled to the integrated circuit and thermally isolated from the integra...

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Bibliographische Detailangaben
Hauptverfasser: Beratan, Howard R, Hanson, Charles M
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:1. Field of the Invention A pyroelectric detector system, the pyroelectric detector element therefor and the method of making the detector element which comprises an integrated circuit () and a pyroelectric detector element () coupled to the integrated circuit and thermally isolated from the integrated circuit. The element includes a lead-containing pyroelectric layer having a pair of opposing surfaces and having a thickness to provide a resonant cavity for radiations in a predetermined frequency range. A bottom electrode () opaque to radiations in the predetermined frequency range is secured to one of the pair of opposing surfaces and a top electrode () is secured to the other of the pair of opposing surfaces which is semi-transparent to radiations in the predetermined frequency range.The top electrode is taken from the group consisting of platinum and nichrome. The lead-containing pyroelectric layer is preferably lead titanate.