Process for treating a semiconductor substrate

Process for treating a semiconductor substrate

1. Technical Field Semiconductor substrates are contacted with a deionized water solution containing an acidic material.

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Hauptverfasser: Arndt, Russell H, Gale, Glenn Walton, Kern, Jr., Frederick William, Madden, Karen P, Okorn-Schmidt, Harald F, Ouimet, Jr., George Francis, Salgado, Dario, Wuthrich, Ryan Wayne
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Sprache:eng
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creator Arndt, Russell H
Gale, Glenn Walton
Kern, Jr., Frederick William
Madden, Karen P
Okorn-Schmidt, Harald F
Ouimet, Jr., George Francis
Salgado, Dario
Wuthrich, Ryan Wayne
description 1. Technical Field Semiconductor substrates are contacted with a deionized water solution containing an acidic material.
format Patent
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title Process for treating a semiconductor substrate
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