Process for treating a semiconductor substrate

Process for treating a semiconductor substrate

1. Technical Field Semiconductor substrates are contacted with a deionized water solution containing an acidic material.

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Bibliographische Detailangaben
Hauptverfasser: Arndt, Russell H, Gale, Glenn Walton, Kern, Jr., Frederick William, Madden, Karen P, Okorn-Schmidt, Harald F, Ouimet, Jr., George Francis, Salgado, Dario, Wuthrich, Ryan Wayne
Format: Patent
Sprache:eng
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Zusammenfassung:1. Technical Field Semiconductor substrates are contacted with a deionized water solution containing an acidic material.