Raised floor system formed of octagonal panels

The present invention generally relates to a raised floor system used in a semiconductor fabrication facility and more particularly, relates to a raised floor system that is formed of octagonal panels mounted to square-topped pedestals that is capable of sustaining large deformation without collapsi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Chen, Wei Tran, Hsu, Hwa-Ching
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present invention generally relates to a raised floor system used in a semiconductor fabrication facility and more particularly, relates to a raised floor system that is formed of octagonal panels mounted to square-topped pedestals that is capable of sustaining large deformation without collapsing. A raised floor system constructed of octagonal panels for use in a semiconductor clean room facility is disclosed. In the raised floor system, a plurality of pedestals each having a top portion and a base portion threadingly engaged together for adjusting a height of the pedestal is first provided. The top portion of the pedestal has a square top surface and four recessed peripheral slots surrounding the top surface. Each of the four recessed peripheral slots being adapted for engaging an octagonal panel. The raised floor system further includes a plurality of octagonal panels each has a flat top surface and a convex bottom surface equipped with a raised peripheral ridge for engaging one of the recessed slots on the top portion of the pedestal such that the flat top surface of the octagonal panel is coplanar with the square top surface of the pedestal when the octagonal panel is mounted to the pedestal.