Method for vaporizing and superheating a sterilizing agent and device therefor

The invention relates to a method for vaporising and super-heating a sterilising agent, in which the sterilising agent is brought to a first temperature and vaporised with the aid of a heated surface, and the vapour is subsequently to brought a second, higher temperature and super-heated by heating elements. A device and a method are described for vaporizing and superheating a sterilizing agent. The sterilizing agent is brought to a first temperature and vaporized with the aid of a heated surface. The vapor is subsequently bought to a second, higher temperature and super heated by means of heating elements. A heater, having super heating channels and heating elements, is connected after a vaporizing chamber. The sterilizing agent is sprayed onto the heated surface, which is heated to the first temperature. The first temperature is lower than the surface temperature at which film boiling begins. The first temperature of the heated surface is sensed and converted into signals for controlling the heating elements for super heating. This sterilizing agent vapor is heated in a counter flow such that the first temperature is kept substantially constant by means of the second, higher temperature and by means of a flow of heat directed in the opposite direction to the flow of vapor.