Layer configuration with a material layer and a diffusion barrier which blocks diffusing material components and process for producing a diffusion barrier

The invention relates to a layer configuration with a material layer and a diffusion barrier which blocks diffusing material components. The invention also relates to a process for producing a diffusion barrier to block diffusing material components. A layer configuration includes a material layer a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Dehm, Christine, Mazure-Espejo, Carlos
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention relates to a layer configuration with a material layer and a diffusion barrier which blocks diffusing material components. The invention also relates to a process for producing a diffusion barrier to block diffusing material components. A layer configuration includes a material layer and a diffusion barrier which blocks diffusing material components. The barrier is disposed in the vicinity of a layer boundary of the material layer and is formed predominantly in grain boundaries of the material layer. A process for producing a diffusion barrier is also provided.