Sensor with amorphous electrode

Disclosed herein are sensors, and method for making an using the same. In one embodiment, the sensor comprises: a first electrode disposed on a ceramic substrate, wherein the first electrode comprises an amorphous metal material comprising a first metal selected from the group consisting of a Group...

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Bibliographische Detailangaben
Hauptverfasser: LaBarge, William, Anderson, Conrad, Ireland, Hugh
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Disclosed herein are sensors, and method for making an using the same. In one embodiment, the sensor comprises: a first electrode disposed on a ceramic substrate, wherein the first electrode comprises an amorphous metal material comprising a first metal selected from the group consisting of a Group 9 metal, a Group 10 metal, a Group 11 metal, and combinations comprising at least one of the foregoing first metals, and zirconium or at least one of phosphorus and boron.