Semiconductor device, liquid crystal display device, semicondutor film producing method, and semiconductor device producing method
This invention concerns with a semiconductor device which is characterized in that the device is provided with a thin film transistor 40 having a polycrystalline semiconductor layer 11 , the semiconductor layer 11 including a channel area 22 , highly doped drain areas 24, 17 positioned on both sides...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | This invention concerns with a semiconductor device which is characterized in that the device is provided with a thin film transistor
40
having a polycrystalline semiconductor layer
11
, the semiconductor layer
11
including a channel area
22
, highly doped drain areas
24, 17
positioned on both sides of the channel area
22
and LDD areas
18
a
, 18
b
positioned between the channel area
22
and the highly doped drain areas
24, 17
and lower in dopant density than the highly doped drain areas
24, 17
, wherein any diameter of the crystal
14
at least partly existing in the LDD area
18
b
is larger than the size of other crystals
15. |
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