Microdevice assembly having a fine grain getter layer for maintaining vacuum
A microdevice assembly ( 20 ) that includes a device microstructure ( 22 ), a housing ( 30 ), and a fine grain getter layer ( 40 ). The housing ( 30 ) has a base portion ( 32 ) and a lid ( 34 ). The device microstructure ( 22 ) is attached to the base portion ( 32 ) and the lid ( 34 ) is hermeticall...
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| creator | Field, Cheryl Wang, Joe Pfeifer, Michael |
| description | A microdevice assembly (
20
) that includes a device microstructure (
22
), a housing (
30
), and a fine grain getter layer (
40
). The housing (
30
) has a base portion (
32
) and a lid (
34
). The device microstructure (
22
) is attached to the base portion (
32
) and the lid (
34
) is hermetically sealed to the base portion (
32
). The housing (
30
) defines a cavity (
38
) surrounding the device microstructure (
22
). The fine grain getter layer (
40
) is on an interior side (
42
) of the lid (
34
) for maintaining a vacuum in the cavity (
38
) surrounding the device microstructure (
22
). The lid (
34
) may be made of metal or have at least a metallic surface in the region where the fine grain getter layer (
40
) is applied. The fine grain getter layer (
40
) has a sub-micron grain size. There is also a method for making the microdevice assembly (
20
). |
| format | Patent |
| fullrecord | <record><control><sourceid>uspatents_EFI</sourceid><recordid>TN_cdi_uspatents_applications_20040189198</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>20040189198</sourcerecordid><originalsourceid>FETCH-uspatents_applications_200401891983</originalsourceid><addsrcrecordid>eNqVirsKAjEQRdNYiPoP01oIWbXYrUWx0M5-GeNkHciLvGD_3gj-gMW5By5nKW53VtG_qLIiwJTIPs0Mb6zsJkDQ7AimiOxgopwpgsG5rfYRbHtz41tWVKXYtVhoNIk2P6_E9nJ-nK67kgJmcjmNGIJhhZm9S-NeyqPs-qEb-sM_7QefTT0B</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Microdevice assembly having a fine grain getter layer for maintaining vacuum</title><source>USPTO Published Applications</source><creator>Field, Cheryl ; Wang, Joe ; Pfeifer, Michael</creator><creatorcontrib>Field, Cheryl ; Wang, Joe ; Pfeifer, Michael</creatorcontrib><description>A microdevice assembly (
20
) that includes a device microstructure (
22
), a housing (
30
), and a fine grain getter layer (
40
). The housing (
30
) has a base portion (
32
) and a lid (
34
). The device microstructure (
22
) is attached to the base portion (
32
) and the lid (
34
) is hermetically sealed to the base portion (
32
). The housing (
30
) defines a cavity (
38
) surrounding the device microstructure (
22
). The fine grain getter layer (
40
) is on an interior side (
42
) of the lid (
34
) for maintaining a vacuum in the cavity (
38
) surrounding the device microstructure (
22
). The lid (
34
) may be made of metal or have at least a metallic surface in the region where the fine grain getter layer (
40
) is applied. The fine grain getter layer (
40
) has a sub-micron grain size. There is also a method for making the microdevice assembly (
20
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20
) that includes a device microstructure (
22
), a housing (
30
), and a fine grain getter layer (
40
). The housing (
30
) has a base portion (
32
) and a lid (
34
). The device microstructure (
22
) is attached to the base portion (
32
) and the lid (
34
) is hermetically sealed to the base portion (
32
). The housing (
30
) defines a cavity (
38
) surrounding the device microstructure (
22
). The fine grain getter layer (
40
) is on an interior side (
42
) of the lid (
34
) for maintaining a vacuum in the cavity (
38
) surrounding the device microstructure (
22
). The lid (
34
) may be made of metal or have at least a metallic surface in the region where the fine grain getter layer (
40
) is applied. The fine grain getter layer (
40
) has a sub-micron grain size. There is also a method for making the microdevice assembly (
20
).</description><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2004</creationdate><recordtype>patent</recordtype><sourceid>EFI</sourceid><recordid>eNqVirsKAjEQRdNYiPoP01oIWbXYrUWx0M5-GeNkHciLvGD_3gj-gMW5By5nKW53VtG_qLIiwJTIPs0Mb6zsJkDQ7AimiOxgopwpgsG5rfYRbHtz41tWVKXYtVhoNIk2P6_E9nJ-nK67kgJmcjmNGIJhhZm9S-NeyqPs-qEb-sM_7QefTT0B</recordid><startdate>20040930</startdate><enddate>20040930</enddate><creator>Field, Cheryl</creator><creator>Wang, Joe</creator><creator>Pfeifer, Michael</creator><scope>EFI</scope></search><sort><creationdate>20040930</creationdate><title>Microdevice assembly having a fine grain getter layer for maintaining vacuum</title><author>Field, Cheryl ; Wang, Joe ; Pfeifer, Michael</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-uspatents_applications_200401891983</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2004</creationdate><toplevel>online_resources</toplevel><creatorcontrib>Field, Cheryl</creatorcontrib><creatorcontrib>Wang, Joe</creatorcontrib><creatorcontrib>Pfeifer, Michael</creatorcontrib><collection>USPTO Published Applications</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Field, Cheryl</au><au>Wang, Joe</au><au>Pfeifer, Michael</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Microdevice assembly having a fine grain getter layer for maintaining vacuum</title><date>2004-09-30</date><risdate>2004</risdate><abstract>A microdevice assembly (
20
) that includes a device microstructure (
22
), a housing (
30
), and a fine grain getter layer (
40
). The housing (
30
) has a base portion (
32
) and a lid (
34
). The device microstructure (
22
) is attached to the base portion (
32
) and the lid (
34
) is hermetically sealed to the base portion (
32
). The housing (
30
) defines a cavity (
38
) surrounding the device microstructure (
22
). The fine grain getter layer (
40
) is on an interior side (
42
) of the lid (
34
) for maintaining a vacuum in the cavity (
38
) surrounding the device microstructure (
22
). The lid (
34
) may be made of metal or have at least a metallic surface in the region where the fine grain getter layer (
40
) is applied. The fine grain getter layer (
40
) has a sub-micron grain size. There is also a method for making the microdevice assembly (
20
).</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
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| language | eng |
| recordid | cdi_uspatents_applications_20040189198 |
| source | USPTO Published Applications |
| title | Microdevice assembly having a fine grain getter layer for maintaining vacuum |
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