Microdevice assembly having a fine grain getter layer for maintaining vacuum
A microdevice assembly ( 20 ) that includes a device microstructure ( 22 ), a housing ( 30 ), and a fine grain getter layer ( 40 ). The housing ( 30 ) has a base portion ( 32 ) and a lid ( 34 ). The device microstructure ( 22 ) is attached to the base portion ( 32 ) and the lid ( 34 ) is hermeticall...
Gespeichert in:
| Hauptverfasser: | , , |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | A microdevice assembly (
20
) that includes a device microstructure (
22
), a housing (
30
), and a fine grain getter layer (
40
). The housing (
30
) has a base portion (
32
) and a lid (
34
). The device microstructure (
22
) is attached to the base portion (
32
) and the lid (
34
) is hermetically sealed to the base portion (
32
). The housing (
30
) defines a cavity (
38
) surrounding the device microstructure (
22
). The fine grain getter layer (
40
) is on an interior side (
42
) of the lid (
34
) for maintaining a vacuum in the cavity (
38
) surrounding the device microstructure (
22
). The lid (
34
) may be made of metal or have at least a metallic surface in the region where the fine grain getter layer (
40
) is applied. The fine grain getter layer (
40
) has a sub-micron grain size. There is also a method for making the microdevice assembly (
20
). |
|---|