Method and apparatus for applying downward force on wafer during CMP

Method and apparatus for applying downward force on wafer during CMP

An apparatus for applying a wafer to a polishing belt during a CMP operation includes a spindle having an upper end and a lower end. A wafer carrier is coupled to the lower end of the spindle. A linear force generator is disposed at the upper end of the spindle. A load cell is positioned between the...

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Bibliographische Detailangaben
Hauptverfasser: Pham, Xuyen, Llera, Anthony, Siu, Andrew, Nguyen, Tuan, Luong, Tony
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An apparatus for applying a wafer to a polishing belt during a CMP operation includes a spindle having an upper end and a lower end. A wafer carrier is coupled to the lower end of the spindle. A linear force generator is disposed at the upper end of the spindle. A load cell is positioned between the linear force generator and the upper end of the spindle. A controller is coupled to the load cell for controlling the force applied by the linear force generator. A method for applying downward force on a wafer during CMP also is described.