Catadioptric reduction lens
A catadioptric projection lens configured for imaging a pattern arranged in an object plane ( 2 ) onto an image plane ( 4 ) while creating a single, real, intermediate image ( 3 ) has a catadioptric imaging group ( 5 ) having a concave mirror ( 6 ) and a beam-deflector ( 7 ), and a dioptric imaging...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A catadioptric projection lens configured for imaging a pattern arranged in an object plane (
2
) onto an image plane (
4
) while creating a single, real, intermediate image (
3
) has a catadioptric imaging group (
5
) having a concave mirror (
6
) and a beam-deflector (
7
), and a dioptric imaging lens group (
20
) that commences after the beam-deflector. The system is configured such that the intermediate image follows the first lens (
17
) of a dioptric section (
8
) and is preferably readily accessible. Arranging the intermediate image both between a pair of lenses (
17, 21
) of the dioptric section and at a large distance behind the final reflective surface of the beam-deflector helps to avoid imaging aberrations. |
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