Method for safely storing an object and apparatus having a storage box and a stocker for storing an object

Method for safely storing an object and apparatus having a storage box and a stocker for storing an object

A method for safely storing an object includes loading the object into a storage box for receiving the object, sealing the storage box, spraying a cleaning gas into the storage box containing the object through a first valve connected to the storage box by providing the cleaning gas from an outside...

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Hauptverfasser: Lim, Chang-Su, Ahn, Yo-Han, Kim, Tae-Hyup, Im, Suk-Hee, Park, Sun-Wook, Kim, Young-Min, Kim, Hyun-Ok
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Sprache:eng
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creator Lim, Chang-Su
Ahn, Yo-Han
Kim, Tae-Hyup
Im, Suk-Hee
Park, Sun-Wook
Kim, Young-Min
Kim, Hyun-Ok
description A method for safely storing an object includes loading the object into a storage box for receiving the object, sealing the storage box, spraying a cleaning gas into the storage box containing the object through a first valve connected to the storage box by providing the cleaning gas from an outside source, and exhausting the cleaning gas from the storage box through a second valve connected to the storage box by increasing a pressure of the cleaning gas in the storage box.
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title Method for safely storing an object and apparatus having a storage box and a stocker for storing an object
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