Method for safely storing an object and apparatus having a storage box and a stocker for storing an object
A method for safely storing an object includes loading the object into a storage box for receiving the object, sealing the storage box, spraying a cleaning gas into the storage box containing the object through a first valve connected to the storage box by providing the cleaning gas from an outside...
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| Hauptverfasser: | , , , , , , |
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A method for safely storing an object includes loading the object into a storage box for receiving the object, sealing the storage box, spraying a cleaning gas into the storage box containing the object through a first valve connected to the storage box by providing the cleaning gas from an outside source, and exhausting the cleaning gas from the storage box through a second valve connected to the storage box by increasing a pressure of the cleaning gas in the storage box. |
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