Electrophotographic photosensitive member and process for producing the same

In an electrophotographic photosensitive member having a support at least the surface of which is conductive, and a photoconductive layer formed thereon containing an amorphous material composed chiefly of silicon, the photoconductive layer has two or more layer regions, and protuberances in a layer region adjoining to a layer region that is closest to the free surface of the electrophotographic photosensitive member have been stopped from growing at the surface of that layer region in which the protuberances occur. The protuberances has been stopped from growing not to become so large as to appear as image defects on images. Also disclosed is a process for producing such an electrophotographic photosensitive member.