Method and system for estimating microelectronic fabrication product yield

Within a method for estimating a microelectronic fabrication product yield and a system for estimating the microelectronic fabrication product yield there is employed a specific mathematic algorithm for estimating yield of a new microelectronic fabrication product within at least one microelectronic...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Liao, Yun-Wei, Ka, Regina, Chu, Mei-Ling
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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