Production method of gas sensor
To provide a method for producing a sensing film for gas sensors by sintering particles comprising a metal or a metal oxide on a substrate, where the sensing film for gas sensors having excellent sensor properties such as sensitivity and responsibility can be easily and simply formed. A nano-meter o...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | To provide a method for producing a sensing film for gas sensors by sintering particles comprising a metal or a metal oxide on a substrate, where the sensing film for gas sensors having excellent sensor properties such as sensitivity and responsibility can be easily and simply formed. A nano-meter order particle (
100
), a dispersant (
110
) for preventing aggregation of the particles (
100
), and a scavenger (
120
) for trapping the dispersant (
110
) at the sintering are mixed in a solvent (
130
) to prepare a paste body (
140
), and this paste body (
140
) is coated on a base material and fired, thereby forming a sensing film. |
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