Micro fabrication with vortex shaped spirally topographically tapered spirally patterned conductor layer and method for fabrication thereof
Within both a micro fabrication and a method for fabricating the micro fabrication there is formed over a substrate a spirally patterned conductor layer spirally topographically tapered in a vortex shape. The spirally patterned conductor layer is particularly useful as a microelectronic inductor str...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | Within both a micro fabrication and a method for fabricating the micro fabrication there is formed over a substrate a spirally patterned conductor layer spirally topographically tapered in a vortex shape. The spirally patterned conductor layer is particularly useful as a microelectronic inductor structure within a microelectronic fabrication. |
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