FERROELECTRIC CAPACITOR WITH ELECTRODE FORMED IN SEPARATE OXIDIZING CONDITIONS

A method of fabricating a ferroelectric capacitor comprises the steps of forming an upper electrode on a ferroelectric film formed on a lower electrode by a sputtering process of a conductive oxide film, wherein the sputtering process is conducted by using a metal target under a first, oxidizing con...

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Bibliographische Detailangaben
1. Verfasser: Takamatsu, Tomohiro
Format: Patent
Sprache:eng
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Zusammenfassung:A method of fabricating a ferroelectric capacitor comprises the steps of forming an upper electrode on a ferroelectric film formed on a lower electrode by a sputtering process of a conductive oxide film, wherein the sputtering process is conducted by using a metal target under a first, oxidizing condition and a second, less oxidizing condition.