Illumination system with a plurality of individual gratings
There is provided an illumination system for wavelengths of 100 nm, having an object plane and a field plane. The illumination system includes a grating element having a plurality of gratings, and a diaphragm. The diaphragm is arranged after the grating element in a beam path from the object plane t...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | There is provided an illumination system for wavelengths of 100 nm, having an object plane and a field plane. The illumination system includes a grating element having a plurality of gratings, and a diaphragm. The diaphragm is arranged after the grating element in a beam path from the object plane to the field plane. |
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